Investigation of loading and force sensing properties of a probe-type microforce sensor with force-distance curves  

作　　者：SUN Chen SU DongChuan LI XiDe 

机构地区：[1]Department of Engineering Mechanics, AML, CNMM, Tsinghua University, Beijing 100084, China

出　　处：《Science China(Technological Sciences)》2011年第6期1362-1370,共9页中国科学（技术科学英文版）

基　　金：supported by the National Natural Science Foundation of China (Grant Nos 10972113 and 10732080);the National Basic Research Program of China (Grant Nos 2007CB936803 and 2010CB631005);SRFDP (Grant No 20070003053)

摘　　要：In this paper,the force-distance curves have been employed to investigate the force sensing properties of the probe-type microforce sensors.In the preliminary studies,two kinds of probe-type microforce sensors have been used to load the objects with dry and wetted surfaces.One is a developed piezoresistive cantilever force sensor with sensitivity of 35 μN/V and the other an atomic force microscope(AFM) cantilever beam probe with sensitivity of 10.4 nN/V.The force outputs corresponding to the regimes of approaching,indenting,and loading are obtained,and the properties of the stability in the approaching regime of the sensors,local mechanical behavior of the tested objects in the indenting regime,and the force sensing of the global samples are analyzed.Experimental results of this analysis are also presented.

关 键 词：force sensor PROBE force-distance curve mechanical behavior surface effects 

分 类 号：U693[交通运输工程—港口、海岸及近海工程] TP212[交通运输工程—船舶与海洋工程]