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作 者:WANG ShiBin JIA HaiKun LI LinAn SUN Heng CUI DiQiang GUO ZhenShan XUE XiuLi
机构地区:[1]Department of Mechanics, Tianjin University, Tianjin 300072, China
出 处:《Science China(Technological Sciences)》2011年第6期1371-1375,共5页中国科学(技术科学英文版)
基 金:supported by the National Natural Science Foundation of China (Grant Nos 10372069, 10732080, 11072174 and 10672120);the Tianjin Natural Science Foundation (Grant No 06YFJZJC00700)
摘 要:As instrument technology is needed for rapid determination of the smaller,thinner and lighter specimens,more stringent demands are related to thin films such as micro-electro-mechanical systems(MEMS),dielectric coatings and electronic packaging.Therefore,the requirement for testing platforms for rapidly determine the mechanical properties of thin films is increasing.Buckling of a film/substrate system could offer a variety of applications,ranging from stretchable electronics to micro-nanoscale metrology.In this paper,a fatigue-loading device has been designed to make the cyclic loading available for investigating the cumulative propagation of thin film buckling.The straight side buckling of thin compressed titanium film with the thickness of 50 nm deposited on organic glass substrates is investigated by using an optical microscope.The cumulative buckling propagation under the cyclic loading of a sequence of peak compression with the frequency 1 Hz is recorded by CCD camera.The buckling extension lengths are calculated by digital image measurement technology.
关 键 词:thin film cyclic load buckling propagation digital image processing
分 类 号:TP391.41[自动化与计算机技术—计算机应用技术] TB484.3[自动化与计算机技术—计算机科学与技术]
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