基于S参数传输法的石英晶体静电容测量  

Quartz crystal static capacitance measurement based on S parameter transmission method

作　　者：董政洁[1] 刘桂礼[1] 王艳林[1] 李东[1] 

机构地区：[1]北京信息科技大学,北京100192

出　　处：《仪器仪表学报》2011年第4期892-897,共6页Chinese Journal of Scientific Instrument

基　　金：北京自然科学基金(KZ200811232018);2010年度科研水平提高项目(5028123201);现代测控技术教育部重点实验室资助项目

摘　　要：介绍了使用S参数传输理论测量石英晶体静电容的方法。以π网络测量石英晶体电参数的硬件电路为测试平台,采用Agilent公司自动矢量网络分析仪E5070B测量标称频率为16.934 4 MHz的石英晶体的两端对S参数。由网络分析方法中二端口参数的转换关系测量晶体的阻抗,以石英晶体两端对等效电路模型为基础,根据谐振频率附近30个频率点处的晶体阻抗可以精确测量静电容。测量结果证明,两端对S参数传输法可以精确稳定地测量石英晶体静电容,为石英晶体其他电参数的精确测量奠定良好基础。Measurement method of quartz crystal static capacitance using S parameter transmission theory is described in this article.Based on hardware circuit of π-network method for measuring electric parameters of quartz crystal,automatic vector network analyzer E5070B produced by Agilent Company is used to measure the S parameters of quartz crystal.Measurements of quartz crystal at nominal frequency of 16.9344MHz are taken as examples.According to the transformation between Z and S parameters,the impedances of quartz crystal can be obtained.Based on the two-port equivalent circuit model of quartz crystal,high-precision quartz crystal static capacitance is calculated from the impedances at 30 frequency points around the resonance frequency.Measurement results prove that the proposed S parameter transmission method can measure quartz crystal static capacitance with high precision and stability,which lays a good foundation for further research.

关 键 词：静电容 S参数传输法 二端对等效电路 矢量网络分析 

分 类 号：TH752.2[机械工程—仪器科学与技术]