键合型有机/无机杂化材料加载条形波导电光调制器  

Strip-loaded Waveguide Electro-optic Modulator Based on Bonded Organic-inorganic Hybrid Material

作　　者：张峰[1] 李晓东[1] 谭震宇[1] 李涛[1] 陈长鸣[1] 张大明[1] 

机构地区：[1]吉林大学电子科学与工程学院集成光电子学国家重点联合实验室吉林大学实验区,长春130012

出　　处：《光子学报》2011年第4期569-572,共4页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61077041;No.60807029);吉林省青年科研基金(No.20100174);吉林大学基本科研业务费专项资金项目(No.200810028;No.200905005);集成光电子学国家重点联合实验室开放课题(No.IOSKL-KFKT-11)资助

摘　　要：相对于普通的有机/无机杂化材料,侧链键合型有机/无机杂化材料能提高生色团的掺杂浓度,避免出现结晶、相分离等现象,同时生色团极化有序性的弛豫因生色团运动受阻而降低,具有较高的热稳定性.本文采用溶胶凝胶法合成了一种性能优良、稳定的侧链键合型有机/无机杂化材料,并将这种材料应用于电光调制器的电光层,利用传统的半导体工艺,采用加载条形波导结构,成功制备了马赫-曾德尔(Mach-Zehnder,M-Z)型电光调制器.测试得到电光调制器在1 550 nm波长下10 kHz的响应信号,为键合型杂化材料应用于光电器件的进一步研究打下了基础.Compared with common organic-inorganic materials,side chain bonded organic-inorganic material has better thermo-stability,and can avoid crystallization and phase separation.And the relaxation of ordered polarized chromophore is restricted as the movement of chromophore is blocked.A kind of stable,good-performance side chain bonded organic-inorganic material was compounded and applied as the electro-optic layer.Conventional semiconductor processing was applied to fabricate strip-loaded waveguide structure and the Mach-Zehnder（M-Z） electro-optic modulators were made.Response signal of 10 kHz was observed at 1 550 nm light source.

关 键 词：有机/无机杂化材料 聚合物 加载条形 电光调制器 

分 类 号：TN814[电子电信—信息与通信工程]