Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering  

作　　者：杨加志 赵成刚 刘晓丽 于俊伟 孙东平 唐卫华 

机构地区：[1]School of Chemislxy and Chemical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China [2]School of Mechanical Engineering, Anyang Institute of Technology, Anyang 455000, China

出　　处：《Chinese Journal of Chemical Engineering》2011年第2期179-184,共6页中国化学工程学报（英文版）

基　　金：Supported by the National Natural Science Foundation of China （10776014）; Nanjing University of Science and Technology （NUST） Research Funding

摘　　要：Microbial cellulose （MC） membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide （ITO） electrodes.Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency （RF） magnetron sputtering.The optimum ITO deposition conditions were achieved by examining crystalline structure,surface morphology and op-toelectrical characteristics with X-ray diffraction （XRD）,scanning electron microscopy （SEM）,atomic force mi-croscopy （AFM）,and UV spectroscopy.The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated.The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content （O2/Ar,volume ratio） in the sputtering chamber.And the ITO crystalline structure directly determines the conductivity of ITO-deposited films.High conductive [sheet resis-tance ～120 Ω·square-1 （Ω·sq-1）] and transparent （above 76%） ITO thin films （240 nm thick） were obtained with a moderate sputtering power （about 60 W） and with an oxygen flow rate of 0.25 ml·min-1 （sccm） during the deposi-tion.These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices.微生物引起的纤维素(MC ) 膜由醋菌属 xylinum NUST4.1 生产了，为透明的铟锡氧化物(ITO ) 的制造被用作灵活底层电极。透明、传导性的 ITO 薄电影在房间温度使用收音机频率(RF ) 磁控管劈啪作响在 MC 膜上被扔。最佳 ITO 免职条件被检验水晶的结构，有 X 光检查衍射(XRD ) 的表面形态学和 optoelectrical 特征，扫描电子显微镜学(SEM ) ，原子力量显微镜学(AFM ) ，和紫外光谱学完成。样品的表抵抗与一根四点的探针被测量，这部电影的抵抗力是计算的。结果表明扔的 ITO 晶体的比较喜欢的取向强烈依赖于与氧内容(O2/Ar，体积比率) 在劈啪作响的房间。并且 ITO 水晶的结构直接决定扔 ITO 的电影的传导性。高传导性[pBAD33 上的 PBAD 的表抵抗 120 ntrol，能生产 CoQ10 直到 3.24 mg？

关 键 词：thin films magnetron sputtering microbial cellulose membrane optical properties indium tin oxide 

分 类 号：O484.1[理学—固体物理] TN304.21[理学—物理]