无水溶胶-凝胶法制备有机-无机杂化光波导薄膜  

Preparation of Organic-Inorganic Optical Waveguide Film by Non-Hydrolytic Sol-Gel Process

作　　者：徐真武[1] 剪明明[1] 徐键[1] 徐清波[1] 孙广清[1] 

机构地区：[1]宁波大学信息科学与工程学院,浙江宁波315211

出　　处：《硅酸盐学报》2011年第4期606-610,共5页Journal of The Chinese Ceramic Society

基　　金：科技部国际科技合作重点项目(2006DFA52910);宁波市科技项目(2008B10042;2009B21007);宁波大学王宽诚幸福基金资助项目

摘　　要：以二苯基二羟基硅烷(diphenylsilanediol,DPSD)和γ-甲基丙烯酰氧基丙基三甲氧基硅烷(γ-Methacryloxypropyl trimethoxy silane,MAPTMS)为前驱体,用无水溶胶-凝胶法合成出有机-无机杂化材料,将其旋涂在硅基片和石英玻璃片上得到杂化光波导薄膜。利用Abbe折射仪测试薄膜的折射率,用Fourier红外光谱仪和Raman光谱仪测试了薄膜的红外吸收光谱和Raman散射光谱,用紫外-可见-近红外分光光度计测试了薄膜的光吸收性质,用棱镜耦合法测试薄膜的光传输损耗。结果表明:控制DPSD的加入量可以调节薄膜的折射率(1.471～1.515);杂化材料在可见和近红外区域的光透过率在90%以上;在265nm处存在强烈的苯环K带吸收峰;薄膜的光传输损耗约为1.0dB/cm。Organic-inorganic hybrid materials were prepared with diphenylsilanediol（DPSD） andγ-methacryloxypropyl trimethoxy silane（MAPTMS） as precursors by a non-hydrolytic sol-gel process.The hybrid films were deposited on silicon wafers and silica glass substrates by spin-coating.The refractive index,optical absorption or transmittance of hybrid films were measured with an Abbe refractometer and ultraviolet-visible-near infrared spectrometer,respectively.Their Raman and infrared spectra were measured with Fourier infrared and Raman spectrometer.The optical propagation loss of hybrid film was determined by a prism coupled method. The results show that the refractive index of the films can be adjusted by controlling the content of DPSD（1.471-1.515）.The light transmittances of the hybrid materials were more than 90%in the visible and near infrared range.There was an intense K band absorption peak of phenyl at 265 nm.The optical propagation loss of hybrid film was approximately 1.0dB/cm.

关 键 词：有机-无机杂化 光学薄膜 无水溶胶-凝胶法 

分 类 号：TB34[一般工业技术—材料科学与工程] TN25[电子电信—物理电子学]