相位拼接闭合条纹干涉图处理技术  

Processing technology for closed fringe interferogram using phase stitching

作　　者：李博[1] 陈磊[1] 边疆[2] 王军[1] 

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]中国科学院光电技术研究所,四川成都610209

出　　处：《红外与激光工程》2011年第4期674-679,共6页Infrared and Laser Engineering

基　　金：江苏省"六大人才高峰"项目(06-E-030);教育部博士点基金(20070288010);兵器预研支撑基金(62301110116)

摘　　要：二维傅里叶变换法处理闭合条纹干涉图时,解调的相位含有符号突变。为矫正符号偏差,提出一种算法,通过一对正交的半侧低通滤波器得到4个含有符号突变的相位面,将其中符号正确的部分进行拼接以得到正确的相位分布。该方法计算量小,并且能有效避开符号突变位置的相位失真区域;选择了合适的滤波窗,并对干涉条纹圆心附近区域的相位进行单独低通滤波处理,使计算精度进一步提高。在算法的仿真实验中,处理了球差、像散、彗差3组典型的仿真干涉图,解调精度可优于λ/50;对实际干涉图进行了分析处理,并与Zygo移相干涉仪测试结果进行了比对,结果吻合较好。When the closed fringe interferogram was demodulated by 2D Fourier transform method,there was sign discontinuity in the retrieved phase.An algorithm was proposed to correct the signs,in which four phases with sign discontinuity were obtained by a pair of orthogonal low pass filters and the parts with right signs were stitched to achieve the right phase.By using this strategy,the phase distortion zone where the sign discontinuity happened was avoided.To achieve more accurate result,a suitable filter window was chosen and the phase around the central zone of the circular fringes was processed by an extra low pass filtering.Three teams of typical simulated interferograms which contained spherical aberration,astigmatism and coma were processed by this method with the demodulated accuracy better than λ/50.It is also applied to analyze a real interferogram,and the result is in good agreement with that tested by the Zygo phase-shift interferometer.

关 键 词：相位恢复 光学测量 闭合条纹 傅里叶变换 相位拼接 

分 类 号：O436.1[机械工程—光学工程]