基于光栅多缝衍射的转角法测量微透镜焦距  

Focal Length Measurement of Microlens by Rotation Method Based on Grating Multislit Diffraction

作　　者：朱咸昌[1] 曹学东[1] 吴时彬[1] 张鹏[1] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209

出　　处：《光学学报》2011年第5期205-209,共5页Acta Optica Sinica

基　　金：国家自然科学基金(11074251)资助课题

摘　　要：介绍了一种利用光栅的多缝衍射分光代替传统转角法的角度测量的微透镜焦距测量方法。平行光入射通过光栅后,由于光栅的衍射效应,在光栅后面将形成各级衍射光。通过测量光栅多缝衍射的±1级光斑和0级光斑的中心距,且由于光栅多缝衍射原理±1级和0级衍射光间的转角由光栅周期和测量光源的波长决定,可通过转角法测量焦距原理完成对微透镜焦距的测量。由于转角由系统参数决定,同时利用图像清晰度函数对光斑进行定焦,分析实验结果表明该方法用于微透镜焦距测量具有较高的测量精度。由于该方法具有较高的测量效率和测量精度,同时可用于阵列数较多的复眼透镜的焦距测量。A new method of microlens focal length measurement by rotation method based on grating diffraction is introduced.When parallel rays travel through the grating,various angle-order diffracted rays will appear behind the grating because of grating diffraction.According to the grating equation,the angle between the ±1 st-order and the 0-order diffracted rays is determined by grating period and testing wavelength.Taking a camera nearby the focus of microlens to get the picture one by one,from clarity function of the picture,the focus position will be decided.In addition,the distance of the ＋1 st-order and the 0-order spot center can be tested from the picture.With the angle and spot central distance between the ±1 st-order and the 0-order,the focal length can be measured.The measurement result shows that this method has a good precision for focal length measurement of microlens.And because of its high efficiency,this method can also be used for focal length of microlens array measurement.

关 键 词：光栅 焦距测量 转角法 微透镜 

分 类 号：O436.1[机械工程—光学工程]