双面抛光机气动加载的建模与仿真  

The Modeling and Simulation of Pneumatic Loading System of Double-sided Polishing Machine

作　　者：茅小海[1] 李伟[1] 黄洁[1] 

机构地区：[1]浙江工业大学机械工程学院,浙江杭州310014

出　　处：《新技术新工艺》2011年第4期55-57,共3页New Technology & New Process

基　　金：国家自然科学基金资助项目(50775207);浙江工业大学机械电子重中之重学科开放基金资助项目(2009EP017)

摘　　要：双面抛光机广泛用于硅片、蓝宝石、陶瓷、磁性材料、电子器材的表面超光滑无损伤的平整加工。气动加载系统是双面抛光机实现精密抛光非常关键的部分。抛光压力加载精度的高低直接决定了抛光机性能的好坏。本文利用法国AMESim软件对气动加载系统进行建模,通过仿真得出了一组最佳PID参数,满足了系统要求,并使系统性能得到提高。Double-sided polishing machine is widely used to high precision dimension,high accuracy surface,and ultra-smooth surface without damaging layer for some hard and brittle workpiec such as silicon wafer,sapphire,ceramic,magnetic substrates,electronic materials,etc.Pneumatic loading system is the very crucial part of the double-sided polishing machine.The polishing machine＇s performances are directly determined by the loading precision.This paper established the modeling and simulation of pneumatic load system by AMESim and then gave optimization PID parameters to improve system performance,and the cure of load capacity.

关 键 词：双面抛光机 气动加载 抛光压力 AMESIM 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]