基于环氧树脂硅烷的平面光波导的制备与表征  

Synthesis and Characterization of Epoxysilane-based Planar Optical Waveguide

作　　者：徐真武[1] 徐键[1] 徐清波[1] 董建峰[1] 

机构地区：[1]宁波大学信息科学与工程学院,浙江宁波315211

出　　处：《光电工程》2011年第5期75-79,共5页Opto-Electronic Engineering

基　　金：国家科技部基金(2006DFA52910);宁波市科技局基金(2008B10042;2009B21007);宁波大学王宽诚幸福基金;宁波大学学生SRIP项目;宁波大学研究生科研创新基金资助项目

摘　　要：采用无水溶胶-凝胶合成方法,以二苯基二羟基硅烷（Diphenylsilanediol,DPSD）和γ-缩水甘油醚氧丙基三甲氧基硅烷（γ-glycidoxypropyl-trimethoxysilane,GPTS）为先驱体,制备出有机-无机杂化光波导材料,并在石英玻璃基片上旋涂制得平面光波导薄膜。用Abbe折射仪测试薄膜的折射率,用紫外-可见光-近红外分光光度计测试了薄膜的光吸收性质,用Fourier红外光谱仪和Raman光谱仪测试了薄膜的红外振动吸收光谱和Raman散射光谱并讨论了材料结构,并用棱镜耦合法测试平面光波导在632.8nm波长下的光传输损耗。结果表明：控制DPSD的加入可以调节薄膜的折射率（1.461~1.481）;薄膜在可见光和近红外区域的光透过率在90%以上;平面光波导的光传输损耗约为0.26dB/cm。Organic-inorganic hybrid optical waveguide materials were prepared by non-hydrolytic sol-gel process, using diphenylsilanediol （DPSD） and gamma-glycidoxypropyltrimethoxysilane （GPTS） as precursors. The planar optical waveguide films were deposited on silica glass substrates by spin-coating. Refractive index, optical absorption or transmittance of hybrid films was measured with an Abbe refractometer and ultraviolet-visible-near infrared spectrometer, respectively. The structure characteristic of the films was discussed with their Raman and infrared spectra which measured with Fourier infrared spectrometer and Raman spectrometer. Optical propagation loss of hybrid film at length of 632.8 nm was measured by using of the prism coupled method. The results show that refractive index of the films could be adjusted by controlling the content of DPSD （1.461~1.481）. Light transmittances of the hybrid materials are approximately 90% in the visible and near infrared range. Optical propagation loss of hybrid film is about 0.26 dB/cm.

关 键 词：无水溶胶-凝胶法 平面光波导 有机-无机杂化 光传输损耗 

分 类 号：TB34[一般工业技术—材料科学与工程] TN25[电子电信—物理电子学]