后摩尔时代取代硅的微电子材料——碳纳米管和石墨烯  

Microelectronic materials replacing silicon in later Moore era: Carbon nanotubes and graphene nanoribbons

作　　者：翟译晨[1] 翟冠杰[2] 

机构地区：[1]长春理工大学理学院,长春130022 [2]德州学院化学系,德州253023

出　　处：《南京信息工程大学学报（自然科学版）》2011年第2期173-182,共10页Journal of Nanjing University of Information Science & Technology（Natural Science Edition）

基　　金：国家自然科学基金(21046003)

摘　　要：在硅电子材料即将发展到顶峰时,碳纳米管及石墨烯以其优良的导体和半导体性质将成为延续硅材料的主流微电子材料.详述了碳纳米管和石墨烯的结构与电学性质,从而说明其作为微电子材料的优势,列举了在微电子器件构建中已经取得的成果及构建器件的方法,并简述了相应碳纳米管和石墨烯的制备方法.In the era that electronic materials based on the silicon ／soutis developing to the peak,carbon nanotubes （CNTs） and Graphene nanoribbons （GNRs）, which have excellent natures of conductor and semiconductor, will become the mainstream in replacing of silicon microelectronic materials. It is verified that CNTs and GNRs possess some advantages as microelectronic materials by a specification of their structure and electronic natures. The paper also listed several existing achievements and promising methods in the process of constructing microelectronic devices, as well as introduced the methods of preparation of corresponding CNTs and GNRs.

关 键 词：微电子材料 碳纳米管 石墨烯 构 建器件 

分 类 号：TN495[电子电信—微电子学与固体电子学]