Fe／Cu纳米多层薄膜中内应力对其力学性能的影响  

INFLUENCE OF INTERNAL STRESS ON MECHANICAL PROPERTIES OF Fe/Cu NANO-MULTILAYER

作　　者：艾利娟[1] 祝江平[1] 吴晓玲[1] 郑瑞廷[1] 程国安[1] 

机构地区：[1]北京师范大学射线束技术与材料改性教育部重点实验室,北京师范大学核科学与技术学院,北京100875

出　　处：《北京师范大学学报（自然科学版）》2011年第2期149-153,共5页Journal of Beijing Normal University(Natural Science)

基　　金：国家973计划课题资助项目(2010CB832905);教育部重点科技资助项目(108124)

摘　　要：利用直流磁控溅射方法制备了Fe/Cu纳米多层膜,使用扫描电子显微镜(SEM)、薄膜应力分布测试仪和纳米压痕技术研究了不同周期结构Fe/Cu纳米多层薄膜的内应力及其纳米力学性能.在Fe/Cu纳米多层薄膜中,由于铁和铜的结构和本征性能的差异,形成多层膜结构后存在张应力,其张应力在周期T=10时达到910.08 MPa,对应的纳米硬度为12.3 GPa.随着多层薄膜调制周期数T的增加而内应力逐渐降低,纳米硬度和弹性模量随着张应力缓释也出现下降.根据纳米薄膜内应力对其力学性能的影响,探讨了内应力与薄膜纳米力学性能的相关性.Structure, internal stress, hardness and elastic modulus of Fe/Cu nano multilayer were investigated by scanning electron microscopy, film stress test and nano-indenting technology. Due to differences in structure and intrinsic properties of iron and copper, there is a tensile stress in Fe/Cu nano- multilayer. With modulating period at ten, a maximum internal stress of 910.08 MPa is observed, with corresponding nano-hardness of 12. 3 GPa. Internal stress, nano-hardness, elastic modulus all decrease with increasing modulating period. The influences of internal stress on mechanical property, relationship between internal stress and mechanical properties are discussed.

关 键 词：Fe/Cu纳米多层薄膜 内应力 纳米硬度 弹性模量 

分 类 号：TG139.7[一般工业技术—材料科学与工程]