瑞奇-康芒两角度检测法的一种波像差解读方法  

Wavefront interpretation of Ritchey-Common test in two angular positions

作　　者：宣斌[1] 谢京江[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室,长春130033

出　　处：《光学技术》2011年第3期259-263,共5页Optical Technique

基　　金：财政部重大装备专项

摘　　要：瑞奇-康芒法是大口径平面元件面形检测的有效方法。通过分析检测光瞳到被检平面的位置转换关系以及波像差到面形误差的幅值转换关系,分别对检测得到的波像差以及干涉仪离焦产生的Power进行转换处理,利用最小二乘法计算出瑞奇-康芒两角度检测时的干涉仪离焦量,从而获得被检平面的面形误差分布。实验部分给出了第4项到第37项泽尼克多项式分布形式的被检平面面形误差的仿真检测结果的误差分布,其峰谷值和均方根值的相对数值误差的平均值分别为6.22%和3.48%,相对分布误差的平均值分别为28.1%和14.4%;并给出了一个随机面形误差的仿真检测结果。此波像差解读方法不存在多项式拟合的误差,适用于任意形状的被检平面通光口径,具有较高的精度,达到了实际工程要求。Ritchey-Common test is one of the most effective methods of testing large flat components.The acquired wavefront and the power caused by defocus of interferometer are processed based on the position transformation from pupil coordinate to surface coordinate and the amplitude transformation from wavefront to surface error.The defocus amounts of Ritchey-Common test in two angular positions are obtained by the least square method and therefore the surface error of the flat under test is obtained.The simulative testing results of the surface errors of the 4th to 37th Zernike term distribution show that the mean relative numerical errors of peak-to-valley and root-mean-square are 6.22% and 3.48% respectively and the mean relative distribution errors are 28.1% and 14.4% respectively.A simulative testing result of a random surface error is also given.The wavefront interpretation method does not rely on the polynomial fitting and can be applied to any kinds of flat shapes.It provides high precision and meets the requirement of engineering application.

关 键 词：应用光学 光学检测 光学平面 瑞奇-康芒 波像差解读 

分 类 号：O439[机械工程—光学工程]