φ150mm菲索干涉仪球面标准具结构分析与设计  

Analysis and design for the structure of reference spheres mirror in φ150mm Fizeau interferometer

作　　者：田伟[1] 王平[1] 王汝冬[1] 隋永新[1] 王立朋[1] 杨怀江[1] 

机构地区：[1]应用光学国家重点实验室,中国科学院长春光学精密机械与物理研究所,长春130033

出　　处：《光学技术》2011年第3期275-278,共4页Optical Technique

基　　金：国家科技重大专项-02专项基金资助(2009ZX02205)

摘　　要：在高精度的光学元件面形检测中,为了保证检测的精度,必须对高精度菲索干涉仪的标准镜的自重和温度变形进行严格地控制。针对高精度菲索干涉仪标准镜的精度要求,设计了一种新的标准镜装卡结构。采用有限元方法分析了标准镜在胶接方式下的表面变形情况,参考面表面变形峰谷(PV)值仅为9.6nm,均方根(RMS)值为2.1nm。同时对不同环境温度下参考面的变形进行了计算得出面形的峰谷值和均方根值。最后介绍球面标准具的装配过程。In the field of high-accuracy optical testing,in order to ensure the measuring precision,the deformations of the interferometer reference mirror induced by self-weight and the thermal effects must be controlled strictly.A kind of creative mechanical structure of reference spheres mirror is designed for the requirement of high-accuracy Fizeau interferometer.In the support schemes fastened by adhesive,the surface deformations of interferometer reference mirror are computed by means of finite element method.In that case,the peak to valley（PV） value is 9.6 nm and RMS value is 2.1 nm.At the same time,the PV and RMS surface figure error of reference spheres caused by ambient temperature fluctuation is achieved.At last assembly for the reference spheres mirror are investigated.

关 键 词：应用光学 菲索干涉仪 标准镜 镜面支承 有限元法 

分 类 号：V254[一般工业技术—材料科学与工程] TQ342.742[航空宇航科学与技术—航空宇航制造工程]