非晶钛酸锶钡薄膜的金属有机分解法制备及其光学性能  

Metal organic decomposition technique and optical properties of amorphous Ba_(0.7)Sr_(0.3)TiO_3 thin films

作　　者：彭静[1] 徐智谋[2,3] 王双保[2,3] 董泽华[4] 

机构地区：[1]武汉科技大学理学院,武汉430081 [2]武汉光电国家实验室,武汉430074 [3]华中科技大学光电子科学与工程学院,武汉430074 [4]华中科技大学化学与化工学院,武汉430074

出　　处：《物理学报》2011年第5期713-718,共6页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:60607006,61079042);教育部留学回国基金(批准号:20081667);湖北省自然科学基金(批准号:2007ABA058)资助的课题~~supported by the National Natural Science Foundation of China(Grant No.60607006,61079042);the Science Research Foundation of Ministry of Education for Returned Overseas Scholar,China(Grant No.20081667);the Hubei Natural Science Foundation of China(Grant No. 2007ABA058)

摘　　要：本文采用2-辛酸钡(Ba(C8H15O2)2)和3-甲基丁基醋酸盐(CH3COOC2H4CH(CH3)2-)为基的特殊前驱体溶液,在硅和石英基片上低温制备Ba0.7Sr0.3TiO3(BST0.7)薄膜.性能测试结果表明,厚度约为214nm的非晶BST0.7薄膜的光学带隙能和折射率分别为4.27eV和n=1.94.薄膜在可见光和近红外区域的消光系数远远低于多晶BST薄膜,约为10-3数量级.激发波长为450nm时,在室温环境下非晶BST0.7薄膜在波长520—610nm处发出强烈的可见光,峰值为540—570nm,而结晶态的BST0.7薄膜则无发光现象.With the development of Si-based optical integrated circuit,much attention has been paid to the crystalline and amorphous（BaxSr1-x） TiO3（BST） films due to its good optical properties.In this study,the amorphous Ba0.7 Sr0.3 TiO3（BST0.7） thin films were grown on the fused quartz and silicon substrates at low temperature by using a metal organic decomposition（MOD）-spin-coating procedure from barium 2-caprylate Ba（C8H15 O2）2 and 3-methylbutyl acetate CH3COOC2H4CH（CH3）2-based special precursors.The optical constants of amorphous BST0.7 thin films including refractive index,extinction coefficient and optical band gap energies were presented.Photoluminescence spectra of BST0.7 films were also observed.The calculated extinction coefficient of 214-nm-thick amorphous BST0.7 thin films in visible and near-infrared region was of the order of 10-3,which is much lower than that of polycrystalline BST thin films.The optical band gap energy and refractive index n were estimated to be about 4.27 eV and n = 1.94,respectively.Intensive photoluminescence at room temperature was achieved in the 520 to 610 nm wavelength range with a strong visible peak at 540—570 nm when excited by 450 nm laser light.No photoluminescence was observed in crystalline BST0.7 thin films.

关 键 词：钛酸锶钡 非晶薄膜 金属有机分解法 光学性能 

分 类 号：TB383.2[一般工业技术—材料科学与工程]