扩散硅压力传感器灵敏度温度漂移的调整  

The Adjustment of Temperature Shifting of Sensitivity in Piezoresistive Pressure Sensors

作　　者：唐慧[1] 季安[1] 章学群 孙艳宾 杨晓燕 

机构地区：[1]沈阳仪器仪表工艺研究所,沈阳市110043

出　　处：《仪表技术与传感器》1999年第11期1-2,18,共3页Instrument Technique and Sensor

基　　金：国家"九五"科技攻关项目

摘　　要：根据扩散硅压力传感器灵敏度温漂产生的原理，分析了灵敏度与温度的关系。并依据实验数据论述了灵敏系数和扩散表面杂质浓度的关系以及电阻温度系数与表面杂质浓度的关系。简单介绍通过调整和控制表面杂质浓度等参数，得到所需的灵敏度温度漂移曲线。The sensibility correlation with temperature has been analyzed on the base of the principle of creating sensitivity temperature shifting in piezoresistive pressure sensors.The sensitive coefficient correlation with surface dopant concentration and resistance temperature coefficient correlation with surface dopant concentration has been discussed in light of experience data,respectively.The paper introduces briefly to adjust and control some parameters,such as surface dopant concertration to attain necessary curve of sensitivity temperature shifting.

关 键 词：灵敏度 温度漂移 扩散硅 压力传感器 传感器 

分 类 号：TH823.203[机械工程—仪器科学与技术] TP212.023[机械工程—精密仪器及机械]