Spectroscopic ellipsometric properties and resistance switching behavior in Si_x(ZrO_2)_(100-x) films  

作　　者：王骁栋 冯亮 魏慎金 朱焕锋 陈坤 徐达 张颖 李晶 

机构地区：[1]Department of Optical Science and Engineering,Fudan University [2]Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education),Fudan University

出　　处：《Chinese Optics Letters》2011年第5期85-88,共4页中国光学快报（英文版）

基　　金：supported by the National Nature Science Foundation of China (No. 60578047);the National "973" Program of China (Nos. 2009CB929201 and No.2010CB933703)

摘　　要：We prepare Si x （ZrO 2 ） 100 x composite films using the co-sputtering method. The chemical structures of the films which are prepared under different conditions are analyzed with X-ray photoemission spectroscopy. Thermal treatment influences on optical property and resistance switching characteristics of these composite films are investigated by spectroscopic ellipsometry and semiconductor parameter ana- lyzer, respectively. With the proper Si-doped Si x （ZrO 2） 100 x interlayer, the Al/ Si x （ZrO 2 ） 100 x /Al device cell samples present very reliable and reproducible switching behaviors. It provides a feasible solution for easy multilevel storage and better fault tolerance in nonvolatile memory application.We prepare Si x （ZrO 2 ） 100 x composite films using the co-sputtering method. The chemical structures of the films which are prepared under different conditions are analyzed with X-ray photoemission spectroscopy. Thermal treatment influences on optical property and resistance switching characteristics of these composite films are investigated by spectroscopic ellipsometry and semiconductor parameter ana- lyzer, respectively. With the proper Si-doped Si x （ZrO 2） 100 x interlayer, the Al/ Si x （ZrO 2 ） 100 x /Al device cell samples present very reliable and reproducible switching behaviors. It provides a feasible solution for easy multilevel storage and better fault tolerance in nonvolatile memory application.

关 键 词：Chemical analysis Composite films Emission spectroscopy Fault tolerance Nonvolatile storage Optical properties Spectroscopic ellipsometry Zirconium alloys 

分 类 号：O484.41[理学—固体物理]