大口径方形非球面镜的高效磨削技术研究  

Research of high efficiency grinding technology for large square aspheric lens

作　　者：李洁[1] 雷向阳[1] 钟波[1] 袁志刚[1] 

机构地区：[1]成都精密光学工程研究中心,成都610041

出　　处：《金刚石与磨料磨具工程》2011年第2期74-78,共5页Diamond & Abrasives Engineering

摘　　要：本文基于X/Y/Z三直线轴平面磨床,研究了圆弧砂轮应用于大口径方形非球面镜的平行磨削新技术,介绍了圆弧砂轮平行磨削的机理、重点解决了砂轮形状误差在线检测、元件面形误差在线检测与误差补偿等关键技术问题。以430 mm×430 mm非球面镜为样件,进行了多轮高效精密磨削工艺实验,面形精度PV均值为4.2μm,表面粗糙度约0.1μm(RMS)。Based on X/Y/Z 3-axis grinding machine,the arc grinding wheel parallel grinding technology for large square aspherical lens was discussed in this paper.The mechanism of arc wheel parallel grinding was introduced,the key problems,such as on-line mesurement for wheel form error,on-line mesurement and compensation for workpiece form error,were solved.Mean results from many runs of high efficiency precision grinding experiments showed that,the surface form error and surface roughness of 430 mm×430 mm aspherical lens attained PV 4.2 μm and RMS 0.1 μm respectively.

关 键 词：非球面 高效磨削 误差补偿 在位测量 

分 类 号：TG58[金属学及工艺—金属切削加工及机床]