光盘表面结构的软模板复制及图案化氧化锌薄膜的纳米压印制备  

Duplication of surface structure of compact disk by soft template and fabrication of surface-patterned ZnO films by nanoimprint technique

作　　者：丁万勇[1] 戴树玺[1] 王洋[1] 王广君[1] 张兴堂[1] 杜祖亮[1] 

机构地区：[1]河南大学特种功能材料教育部重点实验室,开封475004

出　　处：《科学通报》2011年第14期1097-1102,共6页Chinese Science Bulletin

基　　金：国家自然科学基金(20903034;10874040);教育部科技创新工程重大项目培育基金(708062)资助项目

摘　　要：模板的制备和选择在纳米压印技术中非常重要.采用廉价的光盘为模板,利用聚二甲基硅氧烷(PDMS)浇铸到光盘表面,分离后复制得到光盘的负形结构.采用纳米压印技术,以PDMS软模板作为印章对氧化锌纳米溶胶进行直接压印,实现了氧化锌薄膜的表面图案化,经煅烧后得到晶态氧化锌薄膜.The fabrication of nanoimprint templates and choice of suitable resistance layers are important in the nanoimprint lithography technique. This paper proposed that polydimethylsiloxane was used to duplicate the surface structure of compact disk by casting method, and it could be used as nanoimprint stamp. Zinc oxide sol was used as resistance layers in the nanoimprint process. Finally, surface-patterned zinc oxide films were fabricated with surface structure of compact disk by nanoimprint process.

关 键 词：光盘聚二甲基硅氧烷氧化锌溶胶纳米压印表面图案化 

分 类 号：O484.1[理学—固体物理] TP333.4[理学—物理]