三维PZT木堆结构的直写成型  

Direct Write Assembly of Three-dimensional PZT Woodpile Structure

作　　者：蔡坤鹏[1] 孙竞博[1] 李勃[2] 周济[1] 

机构地区：[1]清华大学材料科学与工程系,新型陶瓷与精细工艺国家重点实验室,北京100084 [2]清华大学深圳研究生院新材料研究所,深圳518055

出　　处：《无机材料学报》2011年第5期495-498,共4页Journal of Inorganic Materials

基　　金：国家自然科学基金(90922025,50632030,50621201,10774087,50902081)~~

摘　　要：配制了一种水基锆钛酸铅(PZT)陶瓷浆料,通过直写无模成型的方法制备了直径为微米级的压电木堆结构.流变学测量表明,浆料属于剪切变稀型流体;微观形貌观察和密度测量表明,烧结后的样品已经成瓷,且具有较高的致密度;X射线衍射(XRD)的测试结果表明,烧结后的样品具有三方PbZr0.58Ti0.42O3相;压电常数测试结果显示该结构有较好压电性,且压电常数d33为410pC/N.无模成型技术具有结构可设计性强,成型速度快,成型精度高等优点,为压电材料和器件的设计和应用提供了新的思路.A novel kind of water based lead zirconate titanate （PZT） ink was developed. Woodpile structures with diameter of micrometer scale were constructed from this ink by using direct write assembly technique. According to the rheological test, the ink shows shear-thinning behavior. Micro-morphology and density test results show that the sintered samples have formed ceramics with high relative density. Measurement of X-ray diffraction （XRD） shows that the main phase of sintered samples is rhombohedral PbZro.58Ti0.4203. The value of piezoelectric constant d33 is meas- ured to be 410 pC/N, which shows that the sintered samples exhibit good piezoelectric property. The direct write as- sembly technique has merits of good designability, rapid forming capability and high precision prototyping, which provide new ideas and methods for the design and application of piezoelectric materials and devices.

关 键 词：直写无模成型 PZT 浆料制备 压电性能 

分 类 号：TB321[一般工业技术—材料科学与工程]