部分相干成像的光学传递函数  

Optical transfer function in partially coherent imaging

作　　者：王琦[1] 王光宇[2] 王涌天[3] 

机构地区：[1]中国科学院沈阳计算技术研究所现代制造CAD/CAM技术开放实验室,辽宁沈阳110003 [2]沈阳青云新技术有限公司,辽宁沈阳110003 [3]北京理工大学光电工程系,北京100081

出　　处：《光学技术》1999年第6期69-73,共5页Optical Technique

摘　　要：本文给出在准单色光照明下，部分相干和非相干成像光学传递函数新的计算方法。从基尔霍夫衍射积分出发，引进准波前像差，并在菲涅尔近似下给出点像振幅分布，对照明光源不作匹配限制，计算公式简明，准相干度（ 不同于传统的相干度） 容易计算。利用分片多项式插值计算准波前像差，从而可实现变形成像ＯＴＦIn this paper, a new formula (18) is given for calculating the optical transfer function with incoherent and partially coherent light. The new method is based on starting from the Kirchhoff diffraction integral and introducing the quasi wave front aberration (4) or (21), and using the exit pupil coordinates in the Fresnel approximation to derive the amplidute distribution of the image of a object point, and no requiring arrangement matched for the illumination light. The piecewise polynomial interpolations is used to calculating the quasi wave front aberration function expressed by the exit pupil coordinates. The method is better than the traditional in theory accuracy and in simplify of calculating the degree of quais coherent, which can be used for computing the anamorphic imaged optical systems.

关 键 词：光学传递函数 部分相干 相干度 成像 

分 类 号：O436.1[机械工程—光学工程] O348[理学—光学]