带有温度检测的声表面波气体传感器  

The Surface Acoustic Wave Gas Sensor with Temperature Detection

作　　者：田爽[1] 郝淑娟[1] 赵军发[1] 赵启大[1] 

机构地区：[1]南开大学现代光学研究所,天津300071

出　　处：《南开大学学报（自然科学版）》2011年第2期27-31,共5页Acta Scientiarum Naturalium Universitatis Nankaiensis

基　　金：国家自然科学基金(60572018);天津市科技发展计划(05YFGPGX04900);天津市科技支撑计划重点项目(07ZCKFGX00200)

摘　　要：设计并分析了一种新型多参量声表面波传感器.相比于传统的气体传感器,设计通过两组声路可以对气体与温度同时进行检测并直接显示被测数据.设计解决了不同温度下器件对气体敏感度不同而导致的测不准问题.实验中分别使用了中心频率为99.85 MHz和174.5 MHz的声表面波器件对气体和温度进行了检测.对理论及实验结果进行了讨论分析,实验数据与理论推导结果相吻合.A new type of multi-parameter sensor is designed and analyzed based on surface acoustic wave.Compared with the conventional gas sensor,Gas and temperature can simultaneously be detected through two sets of sound path and directly display the measured data.The uncertainty caused by the different sensitivity can be eliminated under different temperature in gas sensing.Devices whose center frequencies are 99.85 MHz and 174.5 MHz are used in gas and temperature experiments,respectively.The theoretical and experimental results are discussed and analyzed,verifying that the experimental data matches well with the theoretical derivation.The experiment result proves this design can be well applied.

关 键 词：声表面波(SAW) 气体传感器 温度传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]