基于双通道方法对不锈钢高温出气性能的研究  

Evaluation of High Temperature Outgassing Rates of Stainless Steel in Method of Switching between Two Pumping Paths

作　　者：郭迪舟[1,2] 张军辉[1] 蒙峻[1] 杨晓天[1] 罗成[1] 杨伟顺[1] 赵玉刚[1] 胡振军[1] 侯生军[1] 

机构地区：[1]中国科学院近代物理研究所,兰州730000 [2]中国科学院研究生院,北京100049

出　　处：《真空科学与技术学报》2011年第3期368-371,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：采用双通道(SPP)方法对不锈钢材料在高温条件下真空出气性能进行研究。该方法能将传统动态法中真空测量元件对被测量材料出气速率的影响消除,提高测量精度;并通过SPP结构,在数据处理过程中只采用一只规管的真空度读数,避免规管的个体差异带来的计算误差。利用此方法测量了不锈钢材料的高温出气速率,并对比经过真空烘烤后充空气和充干燥氮气的出气性能差异。The outgassing rates of stainless steel（316L） surfaces at high temperatures were measured more accurately via modifying the method of switching between two pumping paths（SPP）.The newly-developed technique outperforms the conventional one in two ways：first,the outgassing rates,originated from both the gauge tubes and the mass spectrometer is excluded;second,the variations in pressure due to different gauges are removed by considering only the pressure of one gauge in data processing.The SPP based technique was tested in the stainless steel vacuum chamber,filled with air and nitrogen,respectively.After baking under the same conditions,and filling with air and dry N2,respectively,the outgassing rates of the stainless steel surfaces,at room and/or high temperatures,were evaluated and compared.

关 键 词：不锈钢 高温出气速率 SPP方法 残余气体 

分 类 号：TB741[一般工业技术—材料科学与工程] TB79[一般工业技术—真空技术]