Ar^+混合诱发非晶Fe/Y多层膜的相变  

PHASE TRANSFORMATION OF Fe/Y MULTILAYERS WITHAMORPHOUS Fe AND Y SINGLE LAYER BY Ar + MIXING

作　　者：李胜利[1] 王长征[1] 

机构地区：[1]山东工业大学材料学院

出　　处：《兵器材料科学与工程》1999年第5期24-26,共3页Ordnance Material Science and Engineering

基　　金：山东省自然科学基金

摘　　要：由双源真空镀膜机制备了Ｆｅ／Ｙ 多层膜，在室温下用１００ｋＶ 的Ａｒ＋ 注入多层膜，通过Ｘ射线衍射方法研究了Ａｒ＋ 混合引起的多层膜相变。结果表明：经２×１０１６／ｃｍ ２ 以上剂量Ａｒ＋ 注入后，沉积态为非晶的Ｆｅ／Ｙ 膜发生了晶化。Multilayer films of Fe/Y were prepared by alternate evaporation of the two elements onto Si single crystal substrates in a dualsource evaporation facilities.Phase transformation of the Fe/Y multilayers by 100keV Ar + mixing at room temperature was studied by X ray diffraction.It has been found that the films with amorphous Fe and Y single layer have crystallized by Ar + mixing above fluence of 2×10 16 /cm 2.This is attributed to the annealing of ion beams.

关 键 词：铁 钇 铼 离子束混合 非晶 多层膜 相变 

分 类 号：O614.811[理学—无机化学] O614.713[理学—化学]