半导体电学特性四探针测试技术的研究现状  

Progress of the four-probe technique for semiconductor conductivity characterization

作　　者：李建昌[1] 王永[1] 王丹[1] 李永宽[1] 巴德纯[1] 

机构地区：[1]东北大学机械工程与自动化学院真空与流体工程研究中心,辽宁沈阳110004

出　　处：《真空》2011年第3期1-7,共7页Vacuum

基　　金：中央高校基本科研业务费专项资金(N090403001);教育部留学回国人员科研启动基金(20091341-4)资助

摘　　要：四探针法是材料学及半导体行业电学表征较常用的方法,其原理简单,能消除接触电阻影响,具有较高的测试精度。由厚块原理和薄层原理推导出计算公式,并经厚度、边缘效应和测试温度的修正即可得到精确测量值。据测试结构不同,四探针法可分为直线形、方形、范德堡和改进四探针法,其中直线四探针法最为常用,方形四探针多用于微区电阻测量。本文综述了四探针测试技术的基本理论,包括四探针法的分类、原理和修正,并阐述了四探针测试技术在微观领域的发展。Four-probe method is one of the most common methods for studying the electrical properties in material science and semiconductor industries owing to its high accuracy and minor demand on sample preparation.The calculation equations can be derived by using the infinite two-dimensional or three-dimensional theories,which can give accurate measurement results after correcting the effects of thickness,edge and temperature.Four-probe method can be divided into modes of straight line,square,Van der Pauw and many improved four-probe methods.The straight line mode is the most used method,while the square one is usually used for micro-area resistance characterization.This paper reviews the four-probe technique from aspects of classification,basic theory,effect correction,and development in the field of microscale devices.

关 键 词：四探针法 半导体表征 微观四点探针 电阻率 

分 类 号：TN307[电子电信—物理电子学]