旋转对称电子光学系统的五级几何像差分析  

Analyses of Fifth Order Aberrations of Rotationally Symmetric Electron Optical System

作　　者：木崇俊[1] 陈尔纲[1] 高俊[1] 李川[1] 

机构地区：[1]云南大学物理系

出　　处：《电子学报》1999年第8期67-69,共3页Acta Electronica Sinica

摘　　要：本文将旋转对称电子光学系统五级几何像差按边界条件分成球差、彗差、亚像散和场曲、亚彗差、像散和场曲、畸变等六类，并分析各类像差在高斯像平面上的图像．Fifth order geometrical aberrations of rotationally symmetric electron optical system are divided into six types according to boundary condition.They are spherical aberration,coma,sub field curvature and astigmatism,sub coma,field curvature and astigmatism and distortion.Analyses for every type's scattering pattern in Gaussian image plane are also given in detail.

关 键 词：旋转对称 电子光学系统 几何像差 球差 

分 类 号：TN16[电子电信—物理电子学]