长波红外光学薄膜器件研究  

Research of Long-wave Infrared Optical Filters

作　　者：朱玲心[1] 张麟[1] 

机构地区：[1]中科院上海技术物理研究所,上海200083

出　　处：《光学仪器》1999年第4期153-155,共3页Optical Instruments

摘　　要：论述了长波红外滤光片制备中膜系设计、监控方案设计、工艺条件等主要技术。列举了允差分析在优选膜系、改善膜厚监控中的具体应用。并以长波红外重要高折射率材料碲化铅为例。This paper discusses the main technology,such as film design,monitoring scheme design and technology condition,in making long wave infrared filters. The specific application of tolerance analysis in selecting film and improving monitoring of film thickness is presented. Taking the sample of PbTe,an important long wave infrared coating material,the paper describes the experimental method and results in studying coating material performance and determining the key technological condition the substrate temperature.

关 键 词：红外滤光片 光学薄膜 红外光学器件 

分 类 号：O484.41[理学—固体物理] TN214[理学—物理]