脉冲YAG激光波形对缸套内壁激光刻蚀微坑形貌的影响  

Effect of YAG Laser Pulse Waveform to Laser Etching Crater Morphology on Cylinder Wall

作　　者：占剑[1] 杨明江[1] 王红才[1] 

机构地区：[1]中国科学院力学研究所,北京100190

出　　处：《中国激光》2011年第6期261-266,共6页Chinese Journal of Lasers

摘　　要：为了减小激光刻蚀微坑表面的再铸层及增加刻蚀微坑的深度,利用双声光调制技术,通过对比0.25,7.5和200μs 3个不同量级脉宽,及对比单峰、双峰和三峰等不同激光脉冲波形的激光脉冲刻蚀微坑形貌,来研究激光脉宽及脉冲波形对刻蚀微坑形貌的影响。结果表明,激光脉宽为0.25μs时毛刺较多,脉宽为200μs时表面熔凝现象明显,脉宽为7.5μs时表面熔凝现象及毛刺都明显减少;单峰波形刻蚀微坑表面毛刺较多,深度为7.5μm,三峰波形刻蚀微坑表面出现熔凝现象,深度为10μm,双峰波形刻蚀微坑表面毛刺及熔凝最少,深度为15μm。In order to reduce the recast layer of the laser etching crater and to increase the etching depth the effect of laser pulse width and waveform on laser etching crater morphology is studied by using double acousto-optic modulation technique,comparing the pulse widths with 0.25,7.5 and 200 μs,and comparing different waveforms with single peak,two peaks and three peaks.The results show that when the pulse width is 0.25 μs,the burr is more;when it is 200 μs,significant surface melting phenomenon appears;and when it is 7.5 μs the phenomenon of surface melting and the burr are significantly reduced.The surface of laser wave etching with a single peak has more burr with the depth of 7.5 μm,the one with three peaks appears the surface melting phenomenon with the depth of 10 μm,and when using two peaks waveform etching,the surface of burr and melting are the least,and the depth is 15 μm.

关 键 词：激光技术 激光波形 脉宽 微坑表面形貌 微坑深度 

分 类 号：TN249[电子电信—物理电子学]