薄膜体声波滤波器结构和设计  

Structure and Design of Thin Film Bulk Resonator

作　　者：李彦睿[1] 石玉[1] 杨杰[1] 钟慧[1] 

机构地区：[1]电子科技大学微电子与固体电子学院,四川成都610054

出　　处：《压电与声光》2011年第3期347-349,共3页Piezoelectrics & Acoustooptics

摘　　要：随着无线通信设备的小型化发展,薄膜体声波谐振器（FBAR）已成为国内外研究热点。该文综述了FBAR滤波器的拓扑结构、工作原理和仿真模型,并选择梯形滤波器方案,通过ADS射频仿真软件建立起MBVD一维等效电路模型模拟其传输特性。按照全球定位系统（GPS）滤波器设计要求,设计了频带为1 530~1 590 MHz的窄带滤波器。仿真表明,增加串、并联谐振器阶数可有效提高带外抑制,而减少其面积比在进一步增加带外抑制的同时,减少了插损和器件整体面积。设计所得滤波器带宽60 MHz,带外抑制50 dB,插损3 dB。With the miniaturization of wireless communications system,FBAR is becoming the hotspot both at home and abroad.This paper reviewed topological structure,basal theory and simulation models of FBAR,and established one dimensional MBVD model by ADS to simulate the ladder-type filter.According to the design target of GPS filter,a narrow band filter with pass band 1 530~1 590 MHz was designed.The results showed that the increase of stage number of serial-parallel resonator could raise the out-of-band rejection remarkably;and the decrease of area ratio could reduce the insertion loss and the total dimension while raising the band rejection also.The pass band of designed filter was 60 MHz;the out-of-band rejection and the insertion loss of were 50 dB and 3 dB respectively.

关 键 词：薄膜体声波谐振器(FBAR)滤波器 MBVD模型 全球定位系统(GPS) 仿真 

分 类 号：TN713[电子电信—电路与系统]