喷雾热分解法制备MgO薄膜的研究  

SPRAY PYROLYSIS APPROACH FOR PREPARING MgO THIN FILMS

作　　者：符晓荣[1] 武光明[2] 宋世庚[3] 宋志棠[1] 高剑侠 林成鲁[1] 

机构地区：[1]中国科学院上海冶金研究所信息功能材料国家重点实验室,上海200050 [2]北京石油化工学院基础部,北京102600 [3]中国科学院新疆物理研究所,乌鲁木齐830011

出　　处：《功能材料与器件学报》1999年第3期235-239,共5页Journal of Functional Materials and Devices

摘　　要：用简单的压缩空气式喷雾热分解法以醋酸镁为原料在Ｓｉ（１００） 衬底上成功地制备了（１００） 取向的ＭｇＯ 薄膜。结果表明，为获得（１００） 取向的ＭｇＯ 薄膜，衬底温度和喷雾速率是关键因素。控制实验条件，在６０００Ｃ得到了（１００） 取向的ＭｇＯ 薄膜。同时，用Ｘ 射线衍射（ＸＲＤ） 、原子力显微镜（ＡＦＭ） 和透射电镜（ＴＥＭ）对薄膜的微观结构进行了分析。oriented MgO thin films have been successfully prepared on Si substrate by a simple spray pyrolysis method started from magnesium acetate. The results indicated that substrate temperature and deposition rate are key factors to grow MgO films and (100) oriented MgO films which were obtained when the substrate temperature and the flow rate of O 2 was 600 0C and 2.5L/min, respectively. In addition, the microstructure of the MgO thin films were examined with X ray diffraction (XRD), transmission electron microscopy (TEM) and atomic force microscopy (AFM).

关 键 词：氧化镁 薄膜 喷雾热分解 制备 集成器件 

分 类 号：TN405[电子电信—微电子学与固体电子学] O484.1[理学—固体物理]