Selection of isolated and individual single-walled carbon nanotube from a film and its usage in nanodevices  

作　　者：王公堂 

机构地区：[1]College of Physics and Electronics, Shandong Normal University

出　　处：《Chinese Physics B》2011年第6期413-415,共3页中国物理B（英文版）

基　　金：Project supported by the National Natural Science Foundation of China (Grant No. 90201025)

摘　　要：Individual and isolated single-walled carbon nanotubes （SWNTs） are important for fabricating relevant nanodevices and studying the properties of the SWNT devices. In this work, we demonstrate that individual and isolated SWNT can be selected and obtained from a film containing a huge number of SWNTs. By using both the polymethylmethacrylate （PMMA） as a negative resist and the electron beam lithography, the selected SWNT can be fixed on a substrate, while the other SWNTs in the film can lift off. The selected SWNT can be used to fabricate nanodevice and a gas sensor of oxygen is demonstrated in this work.Individual and isolated single-walled carbon nanotubes （SWNTs） are important for fabricating relevant nanodevices and studying the properties of the SWNT devices. In this work, we demonstrate that individual and isolated SWNT can be selected and obtained from a film containing a huge number of SWNTs. By using both the polymethylmethacrylate （PMMA） as a negative resist and the electron beam lithography, the selected SWNT can be fixed on a substrate, while the other SWNTs in the film can lift off. The selected SWNT can be used to fabricate nanodevice and a gas sensor of oxygen is demonstrated in this work.

关 键 词：single-walled carbon nanotube electron beam lithography sensor 

分 类 号：TB383.1[一般工业技术—材料科学与工程]