高精度气体微流量计工作用容积的测量  

Working Volume Measurement of a High-precision Gas Micro-flowmeter

作　　者：赵澜[1] 张涤新[1] 冯焱[1] 成永军[1] 卢耀文[1] 徐婕[1] 

机构地区：[1]兰州物理研究所,甘肃兰州730000

出　　处：《机床与液压》2011年第11期85-87,共3页Machine Tool & Hydraulics

摘　　要：作为气体微流量标准的高精度气体微流量计主要用于气体微流量的测量,其中工作用容积值为气体微流量计的主要工作参数之一,因此气体微流量的测量精度也取决于工作用容积值的测量精度。比较称重法及静态膨胀法两种容积测量方法的优缺点,并根据实际情况采用静态膨胀法测量高精度气体流量计工作用容积,得到工作用容积值,并对测量结果进行不确定度的评定。该测量方法具有可原位置测量、操作简单、测量精度高等优点,满足高精度气体微流量计的要求。A gas micro-flowmeter is a primary standard used for the measurement and calibration of gas flow.The working volume is one of important parameters,so the measurement and calibration precision of gas flow mainly depends on the precision of volume measurement.Static expansion method was used to measure working volume of high-precision gas micro-flowmeter after the comparison of the gravimetric method and static expansion method.The volume values were gained,and the combined standard uncertainties of measurement results were analyzed.This measurement method has advantages of in situ measurement,simple operation and higher precision.It satisfies all working requirements of high-precision gas micro-flow meter.

关 键 词：高精度气体微流量计 容积 静态膨胀法 测量不确定度 

分 类 号：TB77[一般工业技术—真空技术]