基于PVDF传感器的高速圆度测量系统  

High-speed Roundness Measurement System Based on PVDF Film Transducer

作　　者：孔明[1] 周洋[1] 程琦[1] 董盈钧[1] 

机构地区：[1]中国计量学院计量测试工程学院,浙江杭州310018

出　　处：《仪表技术与传感器》2011年第5期76-77,97,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金:(60908039)

摘　　要：针对机械加工行业圆度测量高速高效的要求,设计了一种基于聚偏氟乙烯(PVDF)压电薄膜的压电式位移传感器的高速圆度测量系统,利用此传感器高频响、高灵敏度、高信噪比的优势,通过与电荷放大器相结合,实现高速圆度测量。通过实验可知PVDF传感器测量频率响应在1 200 Hz以上,谐振峰频率在3 000 Hz左右,解决了电感传感器在高速圆度测量中测量结果出现失真的问题。测量数据分析结果表明,此系统圆度测量误差可达到1μm以内。多次测量证明,该系统测量结果重复性好、可信性高。For the demands of high speed and efficiency of on-line measurement of roundness in machining industry,a kind of high-speed roundness measurement system based on the piezoelectric displacement transducer that used the PVDF film was developed.It can achieve the goal of high-speed roundness measurement by combining with charge amplifier and taking advantages of transducer such as the high frequency,sensitivity and signalto-noise ratio.The experiment results indicated that the measuring frequency response of the PVDF transducer is over 1 200 Hz and the resonance peak is about 3 000 Hz.It solved the problem of distortion measurement that caused by the inductive transducer in high-speed measurement.The results showed that this system roundness error measurement precision can reach less than 1 μm.Repeated measurements show that the measurement results of the system has high reproducibility and reliability.

关 键 词：聚偏氟乙烯 圆度 测量仪 传感器 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]