新型酞菁有机半导体材料的制备及气敏性研究  

Preparation and gas sensitivity study of new phthalocyanine organic semiconductor materials

作　　者：李赞[1,2] 吴晓宏[1] 姜文锐[3] 施云波[4] 

机构地区：[1]哈尔滨工业大学理学院,哈尔滨150001 [2]哈尔滨学院生命科学与化学学院,哈尔滨150086 [3]哈尔滨工业大学机电工程学院,哈尔滨150001 [4]哈尔滨理工大学测控技术与通讯工程学院,哈尔滨150080

出　　处：《材料科学与工艺》2011年第2期108-112,共5页Materials Science and Technology

基　　金：哈尔滨学院青年基金资助项目(HXKQ200723);国家自然科学基金资助项目(60772019);中国博士后科学基金面上资助项目(20080440839)

摘　　要：针对无机半导体气体传感器材料可修饰性差、工作温度高等缺点,开展了新型金属酞菁类有机半导体气敏材料的研究,并对敏感材料进行了表征,测试结果与化学结构和理论值一致.采用微电子工艺制备平面叉指电极,采用旋涂技术,在叉指电极上形成敏感膜,对制备的旋涂膜进行红外光谱(IR)和原子力扫描电镜(AFM)表征,AFM图像表明薄膜表面均匀、平滑和致密.按照静态法测试了薄膜对NO2气体的气敏特性,结果表明,在室温和50℃时质量浓度为6.5 mg/mL的PbPc(iso-PeO)8旋涂膜相较于CuPc(iso-PeO)8、NiPc(iso-PeO)8旋涂膜表现出对NO2气体更好的敏感性和响应恢复性.Aiming at the poor adjustment and high operating temperature of inorganic semiconductor sensor, a research of new matallophthaloeyanine organic semiconductor gas-sensing materials was carried out. The senisng materials were characterized, and the result was consistent with chemistry configuration and calculational reslut. Plane fork electrode was prepared by using micro-electronic technology, and sensitive membranes were formed on fork electrode by means of spin-coating technology. The thin films were characterized by IR and AFM, and the AFM image showed that the surface of the thin film was uniform, smooth and compact. The gas sensing properties of spin-coated films are determined to NO2 by static state method, and the result showed that PbPe （ iso-PeO）8 with 6.5 mg·mL- 1 had better gas sensitivity and response-recovery characteristic than CuPe （ iso-PeO）8 s and NiPc （ iso-PeO） 8.

关 键 词：有机半导体 气敏材料 NO2 

分 类 号：O647.1[理学—物理化学]