一种0.18μm CMOS毫米波带通滤波器的设计  

Design of a 0.18 μm CMOS Millimeter Wave Band-Pass Filter

作　　者：吴国峰[1] 孙玲玲[1] 文进才[1] 成东波[1] 

机构地区：[1]杭州电子科技大学射频电路与系统教育部重点实验室,杭州310018

出　　处：《微电子学》2011年第3期367-371,共5页Microelectronics

基　　金：国家自然科学基金资助项目(60906015);浙江省自然科学基金资助项目(Y1090877)

摘　　要：基于SMIC 0.18μm RF-CMOS工艺,设计了一种采用垂直地平面共面波导(VGPCPW)传输线的片上30 GHz带通滤波器。通过对传统CPW和VGP CPW两种不同结构传输线的理论研究,对比分析了两者的损耗、特征阻抗及隔离特性,建立了VGP CPW长度可扩展的传输线模型。使用特征阻抗为50Ω的低损耗VGP CPW传输线结构,结合VGP CPW长度可扩展模型与EM分析方法,设计了30 GHz带通滤波器。在片测试结果表明,该毫米波VGP CPW传输线滤波器模型仿真和电磁场仿真S参数曲线与测试结果比较吻合,可为毫米波集成电路滤波器设计提供借鉴。An on-chip 30 GHz band-pass filter using vertical ground plane coplanar waveguide（VGP CPW）was designed based on SMIC 0.18 μm CMOS process.Conventional CPW and VGP CPW were studied,their losses,characteristic impedance and isolation properties were analyzed.A length scalable transmission line model for VGP CPW was established,with which a 30 GHz bandpass filter was designed using low-loss VGP CPW transmission line structure with 50 Ω characteristic impedance.Results from on-wafer measurement indicated that S-parameter of the filter was in good agreement with simulation results.This work provides a reasonable way for millimeter wave filter design.

关 键 词：毫米波 CMOS VGPCPW传输线 带通滤波器 

分 类 号：TN432[电子电信—微电子学与固体电子学] TN713.5