切割废砂浆综合回收利用研究进展  

Research Progess on Recovery and Utilization of Drained Slurry Generated by Cutting Silicon Crystal Using A Wire-saw

作　　者：田维亮[1] 白红进[1] 张红喜[1] 徐冬梅[2] 

机构地区：[1]塔里木大学生命科学学院,新疆阿拉尔843300 [2]山东科技大学,山东青岛266510

出　　处：《中国资源综合利用》2011年第6期24-27,共4页China Resources Comprehensive Utilization

摘　　要：切割行业产生的废砂浆,长期以来采取掩埋和堆放处理的方法,给环境造成固体污染,在市场和环境的压力下,对废砂浆回收利用的研究越来越多。综述了废砂浆的产生、组成与其组分聚乙二醇、碳化硅和硅的回收利用工艺,并认为废砂浆回收产业有望成为新兴工业。Drained slurry that is processed by industry of cutting of silicon wafer is buried and stacked, which cause solid pollution. Study of recovery and utilization of drained slurry is becoming more and more under pressure of marketing and environment. Producing and composition of drained slurry and recovery and utilization process of PEG, SiC and Si are summarized. Its recovery industry will become new industry probablly.

关 键 词：废砂浆 回收利用 综述 

分 类 号：TQ127.2[化学工程—无机化工]