椭圆偏振仪测量薄膜折射率及周期厚度解的分析  

Measuring refractive of film by using elliptic polarimeter and analysing resolution of thickness of one or more periods

作　　者：陈星[1] 童晟飞[1] 王正忆[1] 叶兵[1] 

机构地区：[1]浙江大学物理系,浙江杭州310027

出　　处：《实验技术与管理》2011年第6期42-46,共5页Experimental Technology and Management

摘　　要：运用Mathematica,通过最优化理论开发迭代程序,计算SiO2、ZrO薄膜的折射率和单周期及多周期厚度,并与其他方法的计算结果进行对比分析,表明此方法计算结果可以达到较高的精度。通过分析椭偏参数和薄膜厚度的关系可知,一定厚度的薄膜材料存在一个最佳入射角,在该角度下测得的薄膜厚度具有最高的精度。An iterative programming by the best theory with Mathematica is introduced.The refractive and the thickness of the one or more periods of the SiO2and ZrO thin films are calculated.The results show more accurate compared with other solutions,By analyzing of the relationship between Ψ Δ and θ0 d which can be obtained it is also practical to find the best incident angle when the refraction of the sample is provided,The best accuracy of thin film thickness is obtained under the incident angle.

关 键 词：椭圆偏振 薄膜厚度 最佳入射角 

分 类 号：O484.5[理学—固体物理]