阵列波导器件封装高精密运动平台的轴位移研究  

Study on 6-Axis Motion Stage for Application in Planner Waveguide Device Alignment

作　　者：阳波[1,2] 段吉安[2] 郑煜[2] 

机构地区：[1]湖南师范大学图像识别与计算机视觉研究所,中国长沙410081 [2]中南大学机电工程学院,中国长沙410083

出　　处：《湖南师范大学自然科学学报》2011年第3期41-45,共5页Journal of Natural Science of Hunan Normal University

基　　金：国家自然科学基金重点资助项目(50735007);国家863高技术研究发展技术资助项目(2007AA04Z344)

摘　　要：阵列波导器件的封装是利用超精密的运动平台,将波导芯片与阵列光纤进行对准耦合并固定,实现光波导器件的高性能和高可靠性.通过分析6自由度相邻正交运动轴的超精密运动平台的坐标变换,建立运动轴与末端阵列光纤的位姿运动方程.运动方程表明在假设相邻运动轴正交的条件下,末端阵列光纤的姿态只与旋转轴相关,与平移轴无关,且在旋转±10°范围内反解是确定的.Ultra-precision stage is generally applied for alignment and attachment processes of planner waveguide device,in which aligning planner waveguide chip and fiber array is made firstly,then attaching them tightly is followed,so the optical waveguide device is probably fabricated with high quality and reliability.A kind of ultra-precision stage that consists of adjacent orthogonal shafts is designed.After coordinate transformation is analyzed,kinetic equation that states clearly the relationship between position and attitude of fiber array assembled in the last unit of motion is got.The equation indicates that the attitude of fiber array is only associated with rotational variant of motion,yet without translation of axis,and that back solution exists in the limit of ±10° of rotating.

关 键 词：波导器件 坐标变换 模场耦合 刚体姿态 

分 类 号：TN252[电子电信—物理电子学]