原位制备分级多孔纳米结构氧化铝/金薄膜电极  

In-Situ Fabricated Hierarchical Nanoporous Structure Alumina/Gold Film Electrode

作　　者：唐敏[1,2] 陈丽娟[1,3] 李加伟[1,3] 张兰月 林新华[1] 

机构地区：[1]中国科学院合肥智能机械研究所传感技术国家重点实验室,合肥230031 [2]安徽师范大学化学与材料科学学院安徽省化学与生物传感重点实验室,安徽芜湖241000 [3]中国科学技术大学化学系,合肥230026

出　　处：《微纳电子技术》2011年第7期432-436,449,共6页Micronanoelectronic Technology

基　　金：江苏省自然科学基金(BK200137);中国科学院合肥物质科学研究院青年人才基金

摘　　要：采用与MEMS兼容的工艺,自上而下制作了分级多孔纳米结构的氧化铝/金多层薄膜(HNAGF)电极。利用扫描电子显微镜(SEM)、能量散射谱(EDS)对上述多层薄膜电极结构进行了表征。SEM图像显示底层金层为多孔结构,上层阳极氧化铝层具有有序的多孔的结构特性。以H2O2为探针,通过循环伏安法分别评价了HNAGF电极和传统的裸金薄膜电极的电化学性能。结果表明HNAGF电极不仅对电子传递没有明显障碍,而且对H2O2表现出更好的催化活性和更高的灵敏性。这种新颖的分级多孔纳米薄膜电极将在电流型电化学传感器领域具有广阔的应用前景。The hierarchical nanoporous alumina/gold film（HNAGF）electrode was fabricated by top-down method compatible with the micro-electromechanical systems（MEMS）technology.The microstructure of the HNAGF electrode was characterized by scan electron microscopy（SEM）and energy dispersive spectrometer（EDS）.The SEM images show that the random pores exist in the nanostructure gold under-layer and the anodic porous alumina（AAO）top-layer contain the orderly through-hole pores.Using hydrogen peroxide（H2O2）as electrochemical probes,the electrochemical properties of the HNAGF electrode and the traditional bare gold film electrode were evaluated by cyclic voltammetry.The results demonstrate that the HNAGF electrode not only has no obvious obstacle to electron transfer,but also exhibits the better catalytic activity and higher sensitivity to H2O2.This novel hierarchical nanoporous film electrode will has wide application prospects in the field of current mode electrochemical sensors.

关 键 词：分级多孔纳米结构 微机电系统(MEMS) 氧化铝 金 薄膜电极 电化学性能 

分 类 号：TB383[一般工业技术—材料科学与工程]