一种应用于纳米测量机的高精度干涉仪  

High Precision Heterodyne Interferometer for Nanometer Measuring Machine

作　　者：王霁[1] 朱振宇[1] 李华丰[1] 

机构地区：[1]中国航空工业集团公司北京长城计量测试技术研究所,北京100095

出　　处：《微纳电子技术》2011年第7期464-468,共5页Micronanoelectronic Technology

基　　金：国家"十一五"重点项目(KBA50201510)

摘　　要：为实现纳米三坐标测量机(NMM)中大范围高精度位移的测量(测量范围小于40mm,分辨率小于0.1nm),研制了一种大量程纳米级测量精度的实用化外差干涉仪,并对该干涉仪的光学结构进行分析研究。该系统不但克服了双频激光干涉仪混频的固有缺点,而且在结构上利用光学器件的偏振特性,使系统具有共光路、等光程、光学倍程和相位差成90°正交信号等特点,提高了系统分辨率、抗干扰性能和精度。该系统在40mm的测量范围内,具有λ/4 096的分辨率和纳米级的测量精度。实验结果表明,纳米三坐标测量机对样板1次安装10次测量的实验标准差为4.9nm,10次安装10次测量的实验标准差为8.4nm,具有较好的测量重复性。干涉仪结构符合三坐标的测量要求,可安装在纳米三坐标测量机等仪器中,也可用于高精度的位移测量。To achieve displacement measurement with long range and high precision of nano three-dimensional measuring machine（NMM）（measurement range is less than 40 mm and resolution is less than 0.1 nm）,a long range and nano-precision practical heterodyne interferometer was designed,and the optic structure of the interferometer was analyzed.This system overcomes the inherent shortcoming of the double-frequency laser interferometer frequency mixing.Besides that,the properties of the common optical path,the same optical pass,multiplication optical pass difference（OPD）and 90° phase difference of reference signal were obtained through polarization properties of the optical device on the structure,and the system resolution,anti-interfe-rence performance and measurement accuracy were improved.The system has the λ/4 096 resolution and nanoscale measurement accuracy in the measurement range of 40 mm.The results show that the standard deviations of interferometer are 4.9 nm and 8.4 nm,respectively,in the measurement for 10 times with one installation and 10 times with 10 installations,and the mea-suring repeatability of interferometer is excellent.The interferometer structure is suitable for threedimensional measurement requirements,can be installed in nano three-dimensional measuring machines,and also can be used for high precision displacement measurement.

关 键 词：纳米测量 光外差干涉仪 光程差(OPD) 等光程 相位差 

分 类 号：TH744.3[机械工程—光学工程]