膜厚对SnO_2厚膜型气敏器件灵敏度的影响  

Effects of Film Thickness on the Gas Sensitivity of SnO_2 Thick Film Sensors

作　　者：傅军[1] 

机构地区：[1]海南师范学院物理系,海口571158

出　　处：《无机材料学报》1999年第6期951-955,共5页Journal of Inorganic Materials

基　　金：海南省自然科学基金!59801

摘　　要：本文通过制备不同膜厚的纳米SnO2厚膜型气敏器件试样，测量试样对乙醇气体的灵敏度和试样的阻温曲线并进行复阻抗分析，研究了试样的膜厚对灵敏度的影响．SnO2纳米材料由化学沉淀法制备，采用平面丝网印刷技术制作不同膜厚的气敏试样．结果表明，试样膜厚在65μm左右对乙醇气体具有最大灵敏度．膜厚对灵敏度的影响可能与膜层的晶粒接触状态如接触面积、气孔率、气孔宽度和深度等发生变化有关．The effects of film thickness on the gas-sensing properties of SnO2 thick film sensors were explored by measuring the ethanol gas sensitivity, the variations in resistance with temperature and analyzing the complex impedance plots. The nanoparticles were synthesized by chemical precipitation method and films were prepared by standard screen printing technology. The results showed that the sample having 65μm thickness gave the maximum sensitivity. Changes in sensitivity with thickness might be caused by changes in the state of films, such as the number and the width and depth of the pores.

关 键 词：灵敏度 丝网印刷 二氧化锡 气敏器件 厚膜型 

分 类 号：TN304.21[电子电信—物理电子学] TN379.07