热柱复合毛细芯的成形工艺及其优化  

Forming Technology of Composite Capillary Wick Structure for Heat Column and Its Optimization

作　　者：陶素连[1,2] 汤勇[1] 

机构地区：[1]华南理工大学机械与汽车工程学院∥表面功能结构先进制造广东普通高校重点实验室,广东广州510640 [2]广东水利电力职业技术学院机械系,广东广州510635

出　　处：《华南理工大学学报（自然科学版）》2011年第6期29-35,共7页Journal of South China University of Technology(Natural Science Edition)

基　　金：国家自然科学基金资助项目(50930005);NSFC-广东省人民政府自然科学联合基金重点资助项目(U0834002)

摘　　要：针对当前微电子芯片的高热流密度问题,设计了一种具有复合毛细芯结构的热柱.其成形工艺为利用犁切-挤压的方法加工热柱蒸发端和冷凝端表面的交错微沟槽,然后在微沟槽表面烧结一层铜纤维.文中通过综合分析热柱毛细芯的成形过程,研究犁切-挤压参数对热柱蒸发端微沟槽成形的影响,以及烧结参数对烧结层的影响.结果表明:在热柱毛细芯微沟槽的成形过程中,犁切-挤压深度和沟槽间距共同决定了微沟槽的形貌;犁切-挤压深度越大,微沟槽表面形貌越好;沟槽间距只有在一定范围内时才能形成较好的表面形貌;当径向自动进给量为0.45mm/r、径向微沟槽夹角为3°、螺旋状与径向犁切-挤压深度均为0.3mm时,可获得最优的蒸发沸腾微沟槽结构;当螺旋状犁切-挤压深度为0.3mm、自动进给量为0.50mm/r、轴向微沟槽间距为(1/180)rad时,可获得最优的冷凝强化微沟槽结构;当烧结温度为950℃、烧结时间为60m in、升温速率为5℃/s时,烧结层的烧结性能最优,和管壁结合的能力最强.In order to dissipate the high heat flux of microelectronic chips,a heat column with composite capillary wick was designed by manufacturing stagger microgrooves at the evaporation and the condensation ends of the heat column via ploughing-extrusion（P-E） and by sintering a layer of copper fiber on the microgrooves.Then,the effects of P-E parameters on the formation of microgrooves at the evaporation end,as well as the effects of sintering parameters on the sintering layer,were discussed by comprehensively analyzing the forming process of the wick.The results show that（1） the surface morphology of microgrooves becomes better at a large P-E depth or a suitable microgroove distance in a certain range;（2） the optimal boiling-enhanced microgroove structure is obtained at a cutting feed of 0.45mm/r,an interior angle of radial microgroove of 3° and a P-E depth of 0.3mm;（3） the optimal condensation-enhanced microgroove structure is obtained at a P-E depth of 0.3 mm,a cutting feed of 0.50mm/r and an axial micro groove spacing of（1/180） rad;and（4） the sintered layer is of the optimal sintering performance and the strongest conjuncting ability to the tube wall when it is sintered with a heating rate of 5℃/s at 950℃ for 60min.

关 键 词：热柱 成形工艺 微沟槽 毛细芯 烧结 铜纤维 

分 类 号：TN305.94[电子电信—物理电子学] TG506[金属学及工艺—金属切削加工及机床]