可消除热零点漂移的双压阻半桥压力传感器  

Pressure Sensor Made of Two Piezoresistive Half-Bridges for Cancelling Thermal Zero Shift

作　　者：侯承贵[1] 

机构地区：[1]河北大学电子信息工程学院,保定071002

出　　处：《传感器技术》1999年第5期31-33,共3页Journal of Transducer Technology

摘　　要：提出一种可消除热零点漂移的压阻式压力传感器。该传感器由两个压阻半桥构成。两个“半桥”受力时输出信号的极性相反,而零压时输出信号极性相同。两桥输出信号相减后,其压敏输出与一个压阻全桥的输出值相同,而随温度变化的零压输出则相互抵消。A pressure sensor which can cancel thermal zero shift is described.The sensor is made of two piezoresistive half-bridge.The output polarities of the two half-bridge are opposite as putting pressure on the sensor,and the output polarities are the same without pressure on the sensor.After subtracting one from another,the pressure sensitive output value is equal to that of a full piezoresisitive bridge,and the zero pressure output,which is changed with temperature,is cancelled.The expectative results are obtained in the modelling experiments.

关 键 词：压阻式 压力传感器 热零点漂移 压阻半桥 

分 类 号：TH823.2[机械工程—仪器科学与技术]