层状多孔ZnO厚膜的制备及其气敏性能研究  

Preparation and Gas-sensing Properties of Hierarchical Porous ZnO Thick-film Sensors

作　　者：梅鑫涛[1] 张五星[1] 李爽[1] 吕文中[1] 胡先罗[2] 袁利霞[2] 黄云辉[2] 

机构地区：[1]华中科技大学电子科学与技术系,武汉430074 [2]华中科技大学材料科学与工程学院,武汉430074

出　　处：《材料导报》2011年第14期24-27,31,共5页Materials Reports

基　　金：国家杰出青年科学基金(50825203);国家技术研究发展计划863项目(2009AA03Z225);湖北省自然科学基金重点项目(2008CDA026);武汉市青年科技晨光计划资助项目(200850731354)

摘　　要：由片状材料的定向自组装得到的层状结构可以使膜具有良好的取向性和特殊的物理化学性能。通过对ZnSO4.7H2O在150℃进行水热反应合成出高径厚比的碱式硫酸锌薄片,然后将这种大面积的薄片组装成一定厚度的自持膜并进一步热处理成具有多孔结构的层状ZnO厚膜。通过对600℃、700℃和800℃热处理得到的材料进行XRD及SEM分析,研究了其成分及多孔结构的产生过程,并结合气敏测试结果证明由烧结温度所带来的多孔结构的变化确实会对其气敏性能造成一定的影响。对不同气体进行的气敏性能测试表明,这种层状多孔ZnO结构是一种理想的气敏传感材料,特别适合用于检测H2S气体。Assembly of flaky material into hierarchical architectures can produce films with high orientation and special properties. The zinc hydroxide sulfate（ZHS） large flakes with high diameter-thickness ratio were synthesized by the hydrothermal treatment of ZnSO4 · 7H2O solution at 150℃. Then the large ZHS flakes were used as building blocks to assemble the self-standing films. Then the hierarchical porous ZnO thicbfilm was attained by further heat treatment. According to the X-ray diffraction（XRD） and scanning electron microscopy（SEM） analysis of the materials which were obtained by heat treatment at 600℃, 700 ℃ and 800℃, the formation process of porous structure was investigated. It is confirmed that the changes of porous structure arise from the sintering temperature have a certain influence on the gas sensing property. The test results of different gases demonstrate that these hierarchically porous ZnO architectures are highly promising for gas sensor applications, particularly in H2 S sensing.

关 键 词：ZnO气敏传感器 自组装 多孔结构 水热反应 

分 类 号：TB34[一般工业技术—材料科学与工程]