化学浴沉积法在氧化锌衬底上制备氧化锌微/纳米棒阵列  

ZnO Micro/nano-rod Arrays Grown by Chemical Bath Deposition on ZnO Substr ate

作　　者：张家朝[1] 王海燕[1] 韩永刚[1] 王星雨[1] 薛进奎[1] 王新星[1] 陈瑞灿[1] 

机构地区：[1]郑州大学物理工程学院材料物理教育部重点实验室,郑州450052

出　　处：《陶瓷》2011年第9期44-46,共3页Ceramics

基　　金：河南省科技厅攻关项目基金(No.082102230010)

摘　　要：用磁控溅射在玻璃上制备一层氧化锌作为衬底,采用化学浴沉积法在衬底上制备出排列整齐的氧化锌微/纳米棒阵列,并用扫描电子显微镜对样品形貌进行了表征。分析了不同前驱液浓度、pH值对样品形貌的影响。分析发现:前驱物浓度越大,长出的氧化锌微/纳米棒直径越大;溶液初始pH值对样品的形貌有很大影响;在合适的pH值环境下,氧化锌微/纳米棒生长速度明显快于其他样品,且对生长条件要求不高,非常适合用于氧化锌微/纳米棒大面积制备,笔者采用此方法制备出形貌均匀的,面积达15cm×15cm的氧化锌微/纳米棒。In this article, ZnO film was prepared by megnetron sputtering as seeding layer, and then highly ordered ZnO micro/ nano--rod arrays was fabricated using Chemical Bath Deposition method. SEM was used to investigate the morphology of sam- ples. Effect of different concentration and pH value of predecessor was analysed. Analysis shows that： the higher the concentra- tion of predecessor,the larger the diameter of ZnO micro/nano--rod, pH value has great effect on the morphology of samples, under a suitable high pH value,ZnO miero/nano--rod will have a fast growth rate even in loose environment, so it is vary suitable for large-- scale preparation of ZnO micro/nano-- rod arrays. By this method, we prepared highly uniform ZnO micro/nano-- rod arrays with areas of 15 cm×15 cm.

关 键 词：氧化锌 化学浴沉积 浓度 PH值 

分 类 号：TQ174.75[化学工程—陶瓷工业]