Cr_2O_3二维薄膜的气敏光学特性研究  

Study on gas sensing optical property of Cr_2O_3 2 dimension thin film

作　　者：羊旺[1] 陈凯[1] 郑顺镟[1] 郭斯淦[1] 

机构地区：[1]中山大学物理系,广州510275

出　　处：《激光杂志》1999年第6期14-15,17,共3页Laser Journal

摘　　要：本文介绍了用溶胶凝胶法制备Ｃｒ２Ｏ３ 二维薄膜的方法，并研究了其在乙醇蒸气中和氨蒸气的气敏透射光谱，发现其光学透过率随乙醇蒸气和氨蒸气浓度增加而显著地单调上升，敏感波段扩展到整个可见光区域。其气敏光学特性的灵敏度、单调性及可重复性均可满足光纤传感技术的要求，有望成为制造气敏光纤传感器的新材料。本文亦讨论了Ｃｒ２Ｏ３In this paper,we introduce the preparation of Cr 2O 3 2 dimension film by solgel method,and study its gas sensing optical property.The film shows a high sensitivity to alcohol and ammonia,and its light transmitancy increases monotonously considerably as the gas concentration is increased.The sensitive wavelength range extends to full visible spectrum.This material is of great practical value for gas sensing fiber sensor.The sensing mechanism is also discussed.

关 键 词：Cr2O3薄膜 半导体材料 气敏光学 二维薄膜 

分 类 号：TN304.21[电子电信—物理电子学]