双悬梁光纤布拉格光栅低频加速度传感器  

Low-frequency FBG accelerometer based on double cantilever beam

作　　者：刘钦朋[1] 乔学光[1,3] 赵建林[1] 贾振安[2] 高宏[2,3] 邵敏[1,2] 姜碧强[1] 

机构地区：[1]西北工业大学理学院光信息科学与技术研究所,陕西省光信息技术重点实验室,陕西西安710072 [2]西安石油大学,西安710065 [3]西北大学,西安710069

出　　处：《光电子．激光》2011年第8期1119-1123,共5页Journal of Optoelectronics·Laser

基　　金：国家“863”计划资助项目(2007AA03Z413);国家自然科学基金资助项目(60727004);教育部科技创新工程重大项目培育资金资助项目(708087);陕西省“13115”科技创新工程重大科技专项资助项目(2009ZDKG-42)

摘　　要：为了实现光纤布拉格光栅(FBG)加速度信号的准确测量,提出了一种新颖的双悬梁FBG加速度传感器。设计了传感器的结构及封装方法,理论分析了传感器的工作原理。实验研究了传感器的线性响应、温度响应、共振频率和方向抗干扰特性,结果表明,传感器的加速度响应灵敏度为7.81pm/m/s2,相对误差为2.62%,加速度与波长具有较好的线性关系,线性度为99.8%;在67.5～27.5℃内进行了温度补偿实验,能有效消除温度的影响;传感器具有较好的平坦区和较强的抗干扰能力。In order to realize the precise measurement of acceleration by fiber Bragg grating,a novel double-cantilever beam fiber Bragg grating accelerometer is proposed. Firstly, the configuration and coating of the accelerometer were designed. Secondly, the principle of the fiber Bragg grating accelerometer was analyzed theoretically. The temperature response of FBGs and the acceleration response versus wavelength were analyzed. And the analytical formula of acceleration sensitivity was also deduced. Thirdly, the linear response,temperature response, resonance frequency and anti-jamming of the FBG accelerometer were researched experimentally. Experimental results indicate that the sensitivity is 7. 81 pm/m/s2, the relative error is 2.62 %. The linearity between acceleration and wavelength is 99.8 ;. The temperature compensation from 67. 5 ;Cto 27. 5 ;C is realized triumphantly. The sensor has good fiat response range and faculty of anti-jamming.

关 键 词：光纤光学 光纤布拉格光栅(FBG) 加速度传感器 温度补偿 抗干扰 

分 类 号：TP253[自动化与计算机技术—检测技术与自动化装置] TP212[自动化与计算机技术—控制科学与工程]