平板式压电六维力/力矩传感器的研制  

Development of parallel piezoelectric six-axis force/torque sensor

作　　者：刘俊[1] 秦岚[1] 李敏[1] 刘京诚[1] 薛联[1] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400044

出　　处：《光学精密工程》2011年第7期1569-1579,共11页Optics and Precision Engineering

基　　金：高等学校博士学科点专项科研基金资助项目(No.20100191110011);2010年度重庆市工业发展基金(产研专项)资助项目(10-CXY-42);中央高校基本科研业务费资助项目(No.CDJXS11122220;CDJXS11121145)

摘　　要：针对弹性体式六维力/力矩传感器存在的技术瓶颈,提出了一种新型平板式压电六维力/力矩传感器。首先,介绍了传感器的结构和工作原理,提出了两种石英晶片组布置方案。然后,推导了两种布置方案的传感器的数学模型,并建立了有限元模型,仿真得到了两种结构传感器输出的电荷灵敏度、维间干扰、固有频率等重要参数,确定了石英晶片组相对合理的布置方式。最后,对传感器进行了静态和动态标定。研究结果表明:传感器结构简单合理、仿真分析方法和数学模型正确,固有频率>25 kHz,使用退耦矩阵后传感器的维间干扰<3%,基本满足传感器的设计指标。According to the technological bottleneck of elastic style six-axis force sensors,a novel parallel piezoelectric six-axis force/torque sensor was proposed.Firstly,the structure and operating principle of the sensor were presented,and two different arrangements of the eight group piezoelectric quartz crystals for the sensor were put forward.Then their mathematic models were derived,the finite element model of sensor was established,and the output charge sensitivity,coupling interference and the natural frequency of the sensor were analyzed by ANSYS software.Finally,the static and dynamic characteristics of the sensor were calibrated.Research results indicate that the sensor has simple and rational structure,correct mathematic model and simulation way.Moreover,its natural frequency is more than 25 kHz and coupling interference is less than 3% after using the decoupling matrix.These results satisfy the requirements of sensor design targets.

关 键 词：压电传感器 六维传感器 力/力矩传感器 有限元分析 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]