用于复合型薄膜电极的TiO_2-ZnO复合溶胶的研究  

Research on Composite Film Electrode Prepared by Mixing the TiO_2 Sol and ZnO Sol

作　　者：吴建锋[1] 刘茜[1] 徐晓虹[1] 华全[1] 杨帅[1] 

机构地区：[1]武汉理工大学材料科学与工程学院,湖北武汉430070

出　　处：《陶瓷学报》2011年第2期171-177,共7页Journal of Ceramics

基　　金：国家重点基础研究发展计划资助(编号:2010CB227105)

摘　　要：为了制备TiO2-ZnO复合型薄膜电极,本研究采用了不同Ti/Zn摩尔比,探讨TiO2与ZnO溶胶混合方法对TiO2-ZnO复合型薄膜结构与性能的影响。溶胶制备方法为溶胶-凝胶法(sol-gel),两种复合溶胶的Ti/Zn摩尔比为3∶1及1∶1。对两种混合溶胶分别进行了差热-热重分析(TG-DTA)及XRD分析。测试结果表明:Ti/Zn(摩尔比)=3∶1复合溶胶的差热-热重曲线在370℃和415℃两个温度点出现较为明显的放热峰。对应XRD分析中也显示热处理后的溶胶中出现了锐钛矿和偏钛酸锌这两种晶相,Ti/Zn(摩尔比)=1∶1复合溶胶的差热-热重曲线仅在450℃出现一个明显放热峰,其对应XRD分析显示,在各个热处理温度下,该复合溶胶仅含有唯一晶相偏钛酸锌。两种混合溶胶测试分析表明,以直接混合TiO2及ZnO溶胶的方式,薄膜中将会出现偏钛酸锌,偏钛酸锌具有高介电常数,即具有较低的绝缘性能和较高的导电性能,用于半导体薄膜中可能会有益于光电性能的提高。本文还采用Ti/Zn(摩尔比)=3∶1混合溶胶在未腐蚀和已腐蚀玻璃载体上进行了镀膜实验,对热处理后的样品进行了表面及断面的SEM研究,发现采用分步热处理方式,可以得到较为理想的薄膜,基体腐蚀与否对薄膜和基体的结合性甚微。TiO2-ZnO composite thin film electrodes were prepared with different Ti/Zn mol ratios. The influence of the mixing technique of TiO2 and ZnO sols on the structure and properties of the thin film was discussed. Sols prepared by sol-gel process with the TiO2--ZnO mol ratios of 3：1 and 1：1 were tested by TG-DTA and XRD. Results showect the sol with the Ti/Zn （mol ratio）=3：1 included two exothermic peaks, one at 370℃ and the other at 415℃, and it had two phases, anatase （TiO2） and partial zinc titanate （ZnTiO3）; the sol with the Ti/Zn （mol ratio）=1：1 included only one exothermic peak at 450℃, and it only contained one phase, i.e., zinc titanate （ZnTiO3）. Direct mixing of TiO2 and ZnO sols resulted in the appearance of zinc titanate （ZnTiO3） with a high dielectric constant and good conductivity. The use of zinc titanate （ZnTiO3） in the thin film electrode may raise the electro-optical property. The sol with the TVZn （mol ratio）=3：1 was also coated on the corroded and uncorroded glass matrix The surface and fractured surface of the thin film after heat treatment were tested by SEM. The result showed that the ideal thin film could be got by stepped heat treatment, and the binding between the film and the matrix was little affected by the matrix corrosion.

关 键 词：复合型薄膜 电极 溶胶-凝胶法 TIO2溶胶 ZnO溶胶 薄膜 TG—DTA XRD 

分 类 号：TQ174.75[化学工程—陶瓷工业]