非晶态CuO-SiO_2多孔薄膜的湿敏特性  

Humidity-sensitive Characteristics of Amorphous CuO-SiO_2 Thin Film with High Porosity

作　　者：乐建新[1] 

机构地区：[1]江西师范大学物理系,江西南昌330027

出　　处：《江西师范大学学报（自然科学版）》1999年第4期325-327,共3页Journal of Jiangxi Normal University(Natural Science Edition)

摘　　要：利用溶胶凝胶工艺和浸渍提拉法制备了非晶态CuOSiO2多孔薄膜湿敏元件,研究了它们的感湿特性.制备的湿敏元件具有响应速度极快、灵敏度高、线性度较好。The sol gel technique and dip withdrawal method have been employed to produce amorphous CuO SiO 2 thin film with high porosity.It is shown experimentally through the investigations of the humidity sensitive characteristics of the thin film that it possesses the advantages of quick response velocity,high sensitivity,small humidity hysteresis and excellent consensus,meanwhile,its impedance relative humidity curve behaves quite linearly.

关 键 词：多孔薄膜 非晶态 湿敏特性 溶胶-凝胶法 氧化铜 

分 类 号：O484.4[理学—固体物理] TP212[理学—物理]